Edwards Advanced Diagnostic Services

FabWorks-iMS advanced diagnostic services (EADS) offer multi-parameter algorithms to anticipate the onset of process related issues in vacuum pump and abatement equipment.  These services can significantly reduce costs and improve productivity by:

• Minimising the number of scrapped wafer batches and unplanned tool downtime;
• Maximising wafer throughput / yield;
• Providing reduced total cost of ownership (TCO) by servicing equipment when necessary.

Models:
A range of FabWorks-iMS EADS models are available:

• Dry Pump Deposition
• Booster Deposition
• Abatement Combustor Blockages
• Exhaust/Trap Blockages
• Turbo System Contamination (in development)
• Turbo System Leak Detection (in development

For each model, there are generally three alerts at two levels.