Air Pollution Control Equipment
We are the world leader in Exhaust Management Solutions. Our goals lie far beyond the destruction of toxic and global warming gases, which impact our environment.
We are application experts who understand our customers’ processes, and develop solutions focused on maintaining productivity and lowering risk. Serving all leading process tool OEMs, and with a presence at every major semiconductor fab in the world, our products are designed to meet the specific requirements of existing and developing processes.
Our solutions will improve your process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership through reduced environmental emission and extended product lifetimes with a reduction in on-going service costs.
Atlas Series for the Semiconductor, Flat Panel Display, Photovoltaic & LED markets.
- Atlas - Inward Fire Combustor Technology
- Atlas Etch - Unrivaled Abatement of CF4 & Other High GWP Gases
- Atlas FPD Etch - Designed to Cope with Higher Flows & Aggressive Processes
- Atlas Helios - Ideal for Phosphide & Nitride Processes
Spectra Series for the Flat Panel Display, Photovoltaic & LED markets.
- Spectra G - Clean Abatement for GaN Processes
- Spectra Z - Unique 4-Stage Combustion Technology Suited to Handle High Volumes of Pyrophoric Materials
When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
Learn More about Our History