Vacuum & Air Pollution Control Equipment For The Flat Panel Display Industry
Flat Panel Display (FPD) manufacturing processes require
vacuum and abatement equipment capable of supporting huge processing chambers
and delivering high gas-flow rates with maximum reliability. Vacuum pumps
are needed to pump toxic, pyrophoric and corrosive gases, and handle a large amount of solid process
by-products that are formed in the manufacturing process chambers. Our technology leadership is clearly
demonstrated by our customers who time and time again select us as their
partner of choice.
Our experience in FPD has enabled us to develop solutions
which solve customers’ process issues and optimise productivity. Our extensive range of dry and
turbomolecular pumps (TMPs) are designed to maximise substrate throughput and ultimate zero humidity process condition,
while minimising power, footprint and weight. Combined with our exhaust
management systems, capable of managing high gas flows and the efficient
abatement of toxic and flammable gases,
with long service intervals and potential to connect multiple chambers
to one tool, for a complete integrated vacuum and abatement solution. The introduction of new innovative designs of dry
pump, including iXH, iXL and iXM, has reduced the number process pumps required
per chamber, yet still delivered high production throughput with low
power input, and Green Mode for reduced utilities during idle periods.
Enabling the future demand for higher-resolution, more
interactive, ultra-slim and flexible devices, challenges us in developing
smarter solutions which will reduce cost of ownership and improve process up-time. Whatever the display
future holds, you can rest assured we will rise to the challenge and continue
to be a key enabler in display manufacturing processes.