Heavy Duty Vacuum Pumps & Abatement Solutions For LED Manufacturing
The exploding demand for LEDs is driven by their dramatic
advantages relative to other lighting technologies. Compared to incandescent bulbs, for example,
they offer lifetimes as much as 10 times longer and consume less than a quarter
of the energy. The lighting
possibilities are endless, with smaller sizes, faster switching and improved
out-put, LED manufacturers are challenged with meeting high process demands and
yet reduce manufacturing costs.
Shorter wavelength LEDs (green-blue) use nitride-based
materials while the longer wavelengths (red-yellow) use phosphide-based
materials. Each material poses unique
process challenges in both the vacuum pump and abatement selection, as many of
the materials used are particularly noxious or dangerous to handle.
Our vast experience gained in the semiconductor field puts
us in a unique position to support LED manufacturers in the adoption of more silicon
wafer processing technology, such as Etch, PECVD and ICP chip production into
their process. Our vacuum and abatement
products have the capability to simultaneously handle high hydrogen and ammonia
flow rates throughout the entire critical process, with high levels of safety
LED manufacturing processes typically use MOCVD with high
flows of light hydrogen and highly corrosive ammonia gasses, the advanced
technology incorporated our product ranges has been optimised to meet these
challenges. Our iH, iXH and iXL dry pump
ranges each deliver increased powder handling capability and high resistance to
corrosive gases, with reduced footprint and weight. And the latest range of STP maglev
turbomolecular pumps are the “all-in-one” compact solution with low power for
large volume, high-flow applications.
Abatement products include our award winning Spectra-G
is designed to handle high gas capacity in GaN applications, allowing up to
six MOCVD tools to be connected. For
ease of use Atlas™ is proven in GaAs applications with high flows of
hydrogen incorporates Alzeta™ inward-fired combustion technology to achieve
significantly reduced cost of ownership. All our abatement systems reduce the impact of your operations on the
environment and lower operating costs.
As the technology for LED manufacturing develops so will
Edwards, we are a key enabler and our products have played a significant part
in our customers’ success. Our objective
is to deliver real benefits to our customers, which in turn with make the world
cleaner and brighter for generations to come. Our applications experts can advise you at all stages of the LED
manufacturing process on the most appropriate products to meet your needs.