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At SEMICON® Korea this year Edwards will present innovative solutions that help chip makers remain competitive in today’s demanding and diverse market. The growing demand for more complex designs at smaller technology nodes has resulted in many different semiconductor manufacturing processes that use a wide variety of technology approaches and materials – all relying on new vacuum and abatement methodologies for their successful implementation. 

Edwards is celebrating 100 years of technological innovation this year. It will showcase new approaches for innovation, productivity, and safety in two presentations during SEMICON Korea:

˗ “CVD Precursors and Associated By-products – Ensuring Maximum Chamber Productivity,” by Al Brightman, Sr. Product Manager, Edwards. This paper will present optimum vacuum solutions designed to reduce equipment downtime and improve productivity in the fab. In addition, health and safety risks can be greatly reduced (Wednesday, 23 January, Room 308).

˗ “Enabling 3D and High-aspect Ratio Etch Technologies through On-Chamber Process Vacuum,” by Adam Stover, Applications Manager, Edwards. This paper will not only discuss traditional pumping challenges and proven solutions, but also the novel application challenges that could potentially gate more complex 3D NAND, PRAM and other device structures (Thursday, 24 January, Room 307).

In its booth (D104), Edwards will feature a next-generation model of its popular iXH dry vacuum pump that is specifically-designed to handle condensable gases. It offers a higher temperature capability for harsh processes. 

“Safe and effective management of process exhaust is a growing concern today, especially with the development of increasingly stringent emissions limits world-wide,” said Jason Yun, General Manager, Edwards Korea. “At the same time, advancing technologies are introducing new materials and processes that present challenges, each requiring an optimized vacuum and abatement solution. For example, our next-generation iXH pump is specifically designed to prevent the accumulation of condensable materials inside the pump.” Yun adds, “As Edwards celebrates its 100-year anniversary this year, we look forward to continuing to collaborate closely with our customers to create solutions that enable them to innovate.”

Visit Edwards at booth D104 during SEMICON Korea to learn more about sub-fab solutions and value-added services. SEMICON Korea takes place 23-25 January at COEX, Seoul, Korea. 

Mr F.D. Edwards & 100 Years of Vacuum

Physicist F.D Edwards founded Edwards Vacuum in London in 1919. Whilst he might not recognise the scale of Edwards’ operations today, he would undoubtedly recognise the innovative spirit of his company and the tremendous importance of vacuum in enabling industry and technology, as he did back in 1919. In fact, while many of the critical applications of vacuum he was so familiar with (light bulbs, CRT TVs, vacuum valves) have been replaced with completely new technologies (LEDs, flat panel screens, semiconductor transistors), the requirement for vacuum as a critical process enabler has intensified and the demand for innovative vacuum solutions in new applications is scaling at a phenomenal rate.

Vacuum Enabling Advances in Science and Technology
Edwards has enabled significant advances over the last 100 years and continues to play an ever more crucial role in science and technology. Even in the last decade we have seen many new vacuum applications emerge and grow including the production of smart phones & tablets, HB LED lighting, solar PV panels and Li-ion batteries for electric vehicles. If we simply look at a modern smart phone, the amount of manufacturing content requiring vacuum as a critical process enabler is tremendous, from the advanced semiconductor devices such as processors and memory, mems sensors, high resolution LCD/LED screens, LED flashlights and li-ion batteries to the enclosure forming and anti-reflective, oleophobic screen coatings. It’s hard to imagine life today without the products enabled by vacuum. 

The importance of Vacuum & Abatement to Semiconductor Processes
When it comes to semiconductor processes, vacuum and abatement are two of the most critical functions of the sub-fab enabling Moores Law. Vacuum pumps evacuate the process chambers to provide the required pressures and flows for each process step, and at the same time remove unused process gas and by-products, which then get passed to the abatement systems for treatment so they are safe to release or dispose.

In the 1980s new semiconductor processes and increasing gas flows led to problems with aggressive chemicals and solids collecting in the oil used in oil-lubricated “wet” pumps, resulting in short service intervals and high cost of ownership. These were resolved by the development and introduction of oil-free “dry pumps”. Edwards’ Henry Wycliffe patented the roots/claw dry pump in 1984 which quickly became adopted as the new technology enabling complex semiconductor processes and since then, Edwards has continuously innovated to enable the rapid advances in semiconductor processes and the complex and challenging chemistries being used to accelerate along Moores Law. In many cases, new processes would not have been possible without major innovations in the vacuum and abatement equipment. 

The environmental impact of our products also receives extensive innovation focus. Vacuum pumps alone can represent up to 25% of the total energy consumption of a semiconductor manufacturing facility, and Edwards has a strong track record of innovations which deliver more efficient and sustainable products whilst also solving the increasing chemistry challenges of the gases being pumped. Our latest 5th generation semiconductor dry pump, for example, uses less than 50% of the energy of its predecessor whilst providing higher levels of performance, extended service intervals and a much smaller footprint to improve sub-fab space utilisation. Similarly, our abatement systems enable the safe management of ever more challenging gas chemistries and our worldwide installed base prevents the release of approximately 14 million tonnes equivalent of CO2 emissions every year.

Edwards Strength of Innovation in Vacuum and Abatement
Mr Edwards was an extremely successful entrepreneur who created an environment which enabled innovation to thrive and this has remained in the DNA of Edwards ever since. Many of the markets and applications we serve are very dynamic and have frequently changing and new challenging requirements for our products, therefore being able to develop innovative solutions to complex challenges is a critical enabler for Edwards and for our customers
To stay ahead of all the new vacuum critical applications, Edwards has developed a stream of successful innovations and new products and technologies. In fact, today we have over 20 different principles for creating vacuum and abating gas and a portfolio of over 2300 active granted and pending patents.

A Peek into the Future of Vacuum 
Whatever the future may bring, vacuum will continue to play a critical enabling role.  The scale and number of applications requiring vacuum continue to expand and while technology shifts are certain to occur, Edwards is well positioned to enable them with innovative solutions. 

As we look around our everyday life it’s easy to see some of the pervasive themes driving the continuous demand for new and improved solutions, such as the digital world and the opportunities arising from more intelligent connected products with increased processing power. It’s essential that we continue to focus on solutions which minimise the impact on the environment through more energy and material efficient products, and that we support breakthroughs in science and technology in a sustainable and productive way.

I believe Mr F.D Edwards would be extremely proud of what Edwards has achieved over its entire 100 year history, and our continued focus and investment on innovation puts us in a great position for the next 100 years!

BURGESS HILL, UK. (28th August 2018) - Atlas Copco Group has announced its agreement to acquire the cryogenic business of Brooks Automation, Inc through its wholly owned US entity Edwards Vacuum LLC. Once the deal is complete, which is expected to be in the first quarter of 2019, it will significantly expand Edwards’ offering to the global semiconductor industry.

Brooks Automation, headquartered in Chelmsford, USA is a market leader in the provision of advanced cryopumps and associated products for the semiconductor industry through its CTI-Cryogenics and Polycold brands. 

The acquisition includes cryopump operations in Chelmsford, MA and Monterrey, Mexico as well as a worldwide network of sales and service centres. Brooks Automation’s 50% shareholding in Japan-based joint venture company Ulvac Cryogenics Inc is also part of the deal.

The acquired business will become part of the Semiconductor and Semiconductor Service divisions within Atlas Copco’s Vacuum Technique business area and will significantly expand Edwards’ chamber solutions offering to customers in the semiconductor industry.

Paul Rawlings, President of the Semiconductor division, said: "The acquisition of Brooks Automation’s cryogenic business will help us cement our position as a trusted partner to the world’s leading semiconductor OEMs by enabling the expansion of our current chamber solutions offering through the addition of new technologies and products.”  The planned acquisition is subject to regulatory approvals.

The John Munck Award for technical innovations is this year presented to Paul Neller, Andy Mann, Phil North, Dave Manson, Brian Murphy, Allen Park and Jonathan Youn, who work in the Semiconductor division in Atlas Copco's Vacuum Technique business area. They are presented the award for developing the iXM dry pump. The pump, used in the semiconductor manufacturing process, improves service life and reliability and is smaller, more silent and more energy efficient than its competitors.

“The team has developed a product with a high level of technology and innovation that will help our customers. They have shown such commitment and I am happy to present them the award,”  said Mats Rahmström, Atlas Copco’s President and CEO.

The vacuum pump was developed in South Korea, where a large part of the world's semiconductors are manufactured. 

The John Munck Award, established in 1991, is presented each year to a product developer, designer or a team for outstanding contributions to the overall quality of an Atlas Copco product.

The award will be presented to the winners at the Annual General Meeting on April 24, 2018.  For information on past award winners, please see http://www.atlascopcogroup.com/en/innovation/awards/internal-awards.

More information on the iXM dry pump: https://youtu.be/c5smuhG_KTs

HILLSBORO, Ore. (16 April 2018) – Edwards Vacuum, a leading manufacturer of vacuum and abatement solutions, following completion of the purchase of an eight-acre site located on NE Century Boulevard in Hillsboro, Ore., has begun the process of construction for a new Technology Innovation Center in Hillsboro. The land acquisition process was a collaborative effort between Edwards Vacuum and Avison Young.

The 75,000 square foot facility will serve as the U.K.-based company’s North American semiconductor headquarters. Edwards held a ground-breaking ceremony at the Century Boulevard site attended by company officials and local dignitaries, including Hillsboro City Mayor, Steve Callaway, and President of the Hillsboro Chamber of Commerce, Deanna Palm.

"Edwards has many options for global investment, and our community greatly appreciates Edwards and its commitment to Hillsboro,” stated Mayor Callaway. “As a city, we will continue to support Edwards employees when the new high-tech facility opens.” 

Scott Balaguer, vice president & general manager, Semiconductor Division North America, stated, “Our state-of-the-art innovation center and manufacturing facility is strategically located close to some of our key accounts in the Pacific Northwest, and will enable us to work closely with them, as well as other customers in North America, on R&D and continuous improvement programs. This proximity will also enable us to provide rapid service & support, as well as serve as our regional training center.

Edwards has approximately 100 employees at its current Hillsboro locations, and with consolidation expects to double in size at the new facility, which is scheduled to open in Q2 2019. 

“We are excited about opening our innovation center here in Hillsboro,” said Balaguer. “Edwards is fully committed to the Northwest Region, creating jobs and participating in the local growth, as environmentally conscious corporate stewards in the neighborhood. We anticipate continued expansion on site, as we plan to design & manufacture our integrated vacuum & abatement production solutions, as well as other world-class products in our portfolio.

Ed English, senior vice president at Avison Young, whose team worked closely with Edwards to lead the real estate strategy and implementation said, “This project spanned two years of due diligence, analysis, and negotiation that included the collaboration of half a dozen firms and experts. Edwards’ consistent mission throughout the process was made clear to all parties; they wanted to position the company to best serve their customers and support their growth.” English added, “Edwards originally planned to lease the facility, but ultimately chose to purchase it. They ‘put their money where their mouth is’, proving their definitive commitment to Hillsboro.” 

Burgess Hill, WEST SUSSEX, UK. (13 September 2017) – Edwards Vacuum has been recognized with a 2017 Supplier Excellence Award from Lam Research Corp. (Nasdaq: LRCX), a global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. The awards, presented annually, acknowledge outstanding performance, strategic services, and critical collaboration. 

“We are very proud to be receiving the Lam Research Supplier Excellence Award again this year and are excited to continue our strong partnership with Lam Research into the future. This award celebrates the benefits of collaboration and technological innovation on behalf of both companies,” said Scott Balaguer, vice president – BLM North America Semiconductor Division, Edwards Vacuum.

The Lam Research Supplier Excellence Awards were announced on September 12 at the company’s 2017 Supplier Day event, during which Lam Research focuses on enhancing collaboration and renewing opportunities for mutual success with its customers and suppliers. Executives from suppliers around the world attended the event, and Edwards Vacuum was among the companies seven honored for its achievements. 

"In the dynamic semiconductor equipment industry, high-quality suppliers are a competitive differentiator for Lam Research,” said Tim Archer, chief operating officer of Lam Research. “Edwards Vacuum plays a critical role in our ability to deliver industry-leading products and services to our customers, and we applaud their outstanding performance. We are pleased to present Edwards Vacuum with a Lam Research Supplier Excellence Award for 2017 and look forward to continuing this successful, strategic relationship.” 

BURGESS HILL, WEST SUSSEX, UK (06 September 2017) Edwards is launching the new air cooled nXLi dry vacuum pump range, ideal for applications where consistent performance, reliability and control are required. The nXLi provides a small footprint with quiet operation, making it a convenient and high performing yet compact vacuum pump.

The intelligent drive enables the system to achieve an enhanced performance plateau from single phase power supply, with consistent worldwide operation. There is a choice of control options, with either manual, simple remote or serial communications control as standard, allowing more flexible control options for the system builder. The pump mechanism is non-contacting and oil-free to provide extended operation with maximum up time, up to five years’ service life.

During the initial chamber pump down the intelligent transient overload protection allows a higher power draw for a short period of time, this enables the pump to evacuate the chamber from atmospheric pressure to operating pressure. This higher initial power boost enables the pump to overcome initial gas loads and once operating pressure is achieved, less power is required. 

This new single phase pump is available in two options, nXL110i and nXL200i, both optimised for LCMS (liquid chromatography – mass spectrometry) and ICPMS (inductively coupled plasma mass spectrometry) duties, and capable of handling gas loads of up to 25 slm.  

“Performance is at the core of our new nXLi dry pump”, commented Dave Goodwin, Senior Product Manager, High Vacuum, Edwards. “We are excited to launch this new range, based on the Edwards iXL range of semiconductor dry pumps, they provide peace of mind with a proven track record of performance.” 

For further details, please see:   www.edwardsvacuum.com/nXLi

BURGESS HILL, WEST SUSSEX, UK (7 August 2017) – Edwards is introducing the P3 handheld vacuum measuring system.  An easy to use, battery powered device with direct on-board display of measured pressure, which is ideal for on-site service calls and in-situ pressure checking.  The P3 can provide mobile and fixed pressure measurement for installations of all kinds, including service, maintenance, universities or laboratory applications.

The Piezo Pirani sensor enables pressure measurement of all common gas types, in the range of 1200 to 5x10-4 mbar. With the integrated battery, the device can be attached and operated at any pressure point, and directly display or store up to 2000 values – all data values stored can be exported via USB.

“We are delighted to launch our new hand held P3 pressure gauge”, commented Dave Goodwin, Senior Product Manager, High Vacuum, Edwards. “It is simple to use and ready to go, and with no need for a separate controller or power supply, it is perfect for quickly checking vacuum installations and pump performance.” 

For more information visit www.edwardsvacuum.com