iGX Dry Pump Vacuum System
The iGX dry vacuum pump series sets new
standards for the modern dry pump with zero maintenance between overhauls; this has led to it being one of the world’s most popular dry pumps with over 20,000 units installed in most leading 300mm fabs. iGX range includes both MicroTIM tool interfacing and Ethernet connectivity allowing key data to be viewed via web
pages, as well as a comprehensive set of networking options, to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pump to suit individual fab requirements. A compact footprint allows installation
options including on-tool, close proximity, or remote operation.
Typically a 40%*saving can be made on utilities costs over an entire fab by utilising iGX dry pump technologies (compared to iL/iH dry pumps).
on a 300mm fab in the US, containing 200 tools, 537 pumps / 70% iGX pumps, 30%
iH pumps/iGX fitted with constant flow water valve.