• iXL High Performance Dry Vacuum Pumps

    The iXL family of dry pumps cover the entire range of pump-down requirements encountered in the flat panel display (FPD), semiconductor and solar manufacturing market sectors.

    These leading-performance pumps are designed to maximise substrate throughput, while minimizing power, footprint and weight. In addition, no maintenance is required between overhauls.



  • Small iXL Dry Pumps for Semi & Solar Applications
    Large iXL Dry Pumps for Harsh Applications
    IPUP for Applied Materials Process Platforms
  • Our History

    When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.

    Learn More about Our History